静电卡盘控制电源
SeaTols®高压控制电源（SEM Series）及上位操作软件专为静电卡盘而设计，内置电压、电流、在线检测及反馈装置。SeaTols®SEM Series可根据客户特定需求定制，包括输出电压范围、适用功能、通讯方式。
SeaTols ® HV Power Control (SEM Series) and PC software are specially designed for electrostatic chuck, with built-in voltage, current, on-line detection and feedback devices. SeaTols ® SEM series can be customized according to customers' specific needs, including output voltage range, applicable functions and communication mode.
特征 | Features
动态偏压补偿 | 在线监测|远程控制 | 输出稳定
Dynamic Bias Compensation | Online Monitoring | Remote Control | Stable Output
运用 | Applications
静电卡盘系统控制
Electrostatic Chuck Ssystem Control
设计及制造 | Design and Manufacture
根据使用需求定制（功能、电压输出范围、控制方式等）
Customized according to use requirements (function, voltage output range, control mode, etc.)
Further Product Information
- Specifications
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- Operational Videos
| Specification |
Features |
| Type/Series |
SEM12AH3000 |
| Power Input |
12V/2A |
| HV Output |
Max.±3000V/0.2mA |
| Output Channel |
2 |
| Heat Dissipation |
Slow Air/Normal Temp |
| Control Model |
Remote:RS485/RS232/I.O/LAN |
| Output Accuracy |
Max.5% |
| Power Frequency |
50K~80K Hz |
| Alarm Current |
Max.5mA Continued 5 μs |
| Ripple Voltage |
Max.150mV/10μs |
| Dynamic Rresponse |
Max.100μs |
| Load Adjustment Rate |
Rated 0.5% |
| Conversion Efficiency |
Max.92% |
| External Size |
482x320*66 |
| Warranty Period |
8000H |
Special for Electrostatic Chuck
